Model OAI 800E: Enhanced Front and 
Backside Semi-automatic Mask Aligner 
With over 4 decades of product development 
and manufacturing in the semiconductor 
industry, OAI meets the growing challenge 
of a dynamic market with an elite class of 
Standard Frontside Features 
• Dual 1MP resolution GIGE CCD cameras
 • Substrates up to 8” square • masks to 9”x9” 
• Windows PC controlled with recipe storage
 • Motorized joystick for aliugnment and positioning
 * Exposure modes: Vacuum, hard soft & proximity
 • Auto Wedge Effect compensation
 Standard Backside Features 
• All of the above, plus:
 • 2 additional cameras (4 total)
 • Digital zoom
 • Motorized backside optics focus
 photolithography equipment designed 
for R&D and semi-automatic production. 
Built on the proven OAI modular platform, 
the Model 800E is an enhanced, high
performance high-resolution lithography 
system which delivers a level of performance 
that is unmatched at this price point. The 
aligners feature OAI’s Advanced Beam 
Optics offering exceptional uniformity. 
Upgradable with OAI’s Precision Lithography 
Modules, ther Model 800E is a versatile tool 
in the lab or in the field. The Model 800E 
utilizes Windows 10 control and recipe 
storage. It also comes with joystick controlled 
alignment and optics stages, and can be 
configured with non-contact 3-point wedge 
effect correction and auto-align capability. 
These combined features are typically found in 
more expensive mask aligners but are available 
for an affordable price on the Model 800E.