ANCORP’s Multiport valve is a fully-customizable high vacuum valve designed for 3-way, 4-way, or 5-way flow in demanding semiconductor and coating processes. Its modular design and configurable components enable a variety of flow patterns through the valve.

The Multiport valve consists of a cube-shaped valve body, a fully stabilized Extended Life (XL) valve stem, a fully ported ball, and end caps (body ports), all machined from corrosion-resistant 316L stainless steel. Flanged body ports or blank end caps are installed on the sides or bottom of the valve body to create a 3, 4, or 5-way valve. An L-port, T-port, or other ported ball rotates within the valve to switch flow between body ports. FKM or FFKM O-rings seal the valve stem and end caps from atmosphere while PTFE valve seats cold flow around the ball to seal the desired body port(s) from the other body ports. The PTFE sealing surfaces are protected from direct deposition or contact with process matter, maintaining a clean, dynamic seal to prevent failure due to contamination.

The multiport valve is available in two designs: the standard Multiport Valve, for general applications where thermal performance is not critical, and the Multiport Valve with Heat-Thru Technology designed for high temperature performance when used with heaters.

Applications

The corrosive-resistant, fast-actuating design of ANCORP’s multiport valve makes it ideal for diverting, switching, combining, or splitting flow in and around reactors, traps, scrubbers, and exhaust lines on vacuum coating, etch, and abatement tools.

With a fully ported ball and minimally wetted internal components, the multiport valve resists particulate buildup and valve contamination in harsh or dirty downstream environments. 3-Way, 4-Way, and 5-way multiport valves can replace multiple 2-way valves and additional fittings on vacuum lines and manifolds.

Multiport Valve Configuration

The Multiport valve’s modular design allows for six body port configurations and six ball configurations. Body ports, ball ports, ball position, and actuation type can be specified to enable a variety of flow switching, diverting, or mixing operations between source and destination ports.

Body Port Configurations

Body ports or blank end caps can be configured on the sides and bottom of the valve body to make a 3, 4, or 5-way valve.

Three Way Valve

3-way valve body port configurations include 3H (3 ports in a horizontal orientation), 2HI1V (two horizontal inline ports with one vertical port on the bottom face), and 2HA1V (two horizontal ports at an angle with one vertical port on the bottom face).

Four Way Valve

4-way valve configurations include 4H (four horizontal ports on all side faces of the valve) and 3H1V (three horizontal ports with one vertical port on the bottom face).

Five Way Valve

A 5-way valve configuration, 4H1V, has body ports on all faces of the valve (four horizontal ports with one vertical port on the bottom face).